EHS Equipment Clean-room

Local VOC


In the production of semiconductor industry, Local VOC adsorbs and concentrates the organic compound volatilised in the process, such as the photoresist coating in the photo area. These organic compounds will be transported to the central organic exhaust system for centralised treatment. lt prevents the accumulation of VOCs in the cleanroom, providing efficient guarantee for professional health and safety of employees, and improves the yield of process products.


Local VOC
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  • Local VOC

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Local Scrubber

Local Scrubber

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Vacuum Pump

Vacuum Pump

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Chiller

Chiller

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Contact number: 86-021-59900792
Electronic Fax: 86-021-59900793
Electronic E-mail:shengjian@sheng-jian.com
Headquarters Address: Shengjian Building, 301 Huifa Road, Jiading District, Shanghai

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